Semiconductor Process Technology

"Semiconductor Process Technology" (SPT) is part of the module "Semiconductor Physics & Semiconductor Process Technology", a compulsory module for all AMA-students. You can find the other part of this module entitled "Semiconductors" here in OPAL as well.

SPT-competencies: Students will get familiar with processes, methods, and equipment typically used in semiconductor cleanrooms, both in research institutes and industry. The module will enable the students to describe suitable technologies, as well as their fundamentals and limitations, for the micro- and nano-structuring of semiconductors, dielectrics, and metals. Furthermore, students will be able to apply this knowledge to identify the relevant fabrication steps and a suitable sequence required for basic semiconductor devices or test structures.